@article{767811,
  author = {J. Zavada and R. Wilson and J. Comas},
  title = {Redistribution of H and Be in GaAs/AlAs Multilayer Structures with Post-Implantation Annealing},
  year = {1989},
  number = {65},
  month = {1989-03-01 00:03:00},
  publisher = {Journal of Applied Physics},
  language = {en},
}