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Real Time Shape Evolution of Nanoimprinted Polymer Structures During Thermal Annealing

Published

Author(s)

Ronald L. Jones, T Hu, Christopher L. Soles, Eric K. Lin, R M. Reano, Stella W. Pang, D M. Casa

Abstract

The real time shape of nanoimprinted polymer patterns are measured as a function of annealing temperature and time using a new metrology technique, Critical Dimension Small Angle X-ray Scattering (CD-SAXS). Periodicity, linewidth, line height, and sidewall angle are reported both below and above the bulk glass transition temperature (TG) for a nanoimprinted line/space pattern of poly(methyl methacrylate) (PMMA). For T > TG, shape changes are accelerated in early stages due to the reduction of high energy corners, yielding to a slowed rate in longer time regimes.
Citation
Nano Letters
Volume
6
Issue
8

Keywords

dimensional metrology, glass transition temperature, Nanoimprint Lithography, nanomechanics, small angle x-ray scattering

Citation

Jones, R. , Hu, T. , Soles, C. , Lin, E. , Reano, R. , Pang, S. and Casa, D. (2006), Real Time Shape Evolution of Nanoimprinted Polymer Structures During Thermal Annealing, Nano Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852413 (Accessed June 20, 2024)

Issues

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Created July 18, 2006, Updated February 19, 2017