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PUBLICATIONS

Proton NMR Determination of Miscibility in a Bulk Model Photoresist System: Poly(4-hydroxystyrene) and the Photoacid Generator, Di-(t-butylphenyl) Iodonium Perfluorooctanesulfonate

Published

Author(s)

David L. VanderHart, Vivek M. Prabhu, Eric K. Lin
Citation
Chemistry of Materials
Volume
16(16)
Pub Type
Journals

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Local Download

Keywords

Blends, Electronic Materials, Lithography, Microstructure, NMR, Spectroscopy, iodonium sulfonate, miscibility, photoacid generator, photoresist, poly(hydroxystyrene), proton, spin diffusion

Citation

VanderHart, D. , Prabhu, V. and Lin, E. (2004), Proton NMR Determination of Miscibility in a Bulk Model Photoresist System: Poly(4-hydroxystyrene) and the Photoacid Generator, Di-(t-butylphenyl) Iodonium Perfluorooctanesulfonate, Chemistry of Materials, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853953 (Accessed April 26, 2024)

Created January 1, 2004, Updated February 17, 2017