Hurly, J.
(1998),
Properties of Process Gases Determined Accurately with Acoustic Techniques, International Conference on Characterization and Metrology of ULSI Technology, Gaithersburg, MD
(Accessed May 12, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Properties of Process Gases Determined Accurately with Acoustic Techniques
Published
Author(s)
Proceedings Title
International Conference on Characterization and Metrology of ULSI Technology
Conference Dates
March 23-27, 1998
Conference Location
Gaithersburg, MD
Conference Title
Proceedings of International Conference on Characterization and Metrology of ULSI Technology
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created March 23, 1998, Updated February 17, 2017