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Properties of Process Gases Determined Accurately with Acoustic Techniques

Published

Author(s)

John J. Hurly
Proceedings Title
International Conference on Characterization and Metrology of ULSI Technology
Conference Dates
March 23-27, 1998
Conference Location
Gaithersburg, MD
Conference Title
Proceedings of International Conference on Characterization and Metrology of ULSI Technology

Citation

Hurly, J. (1998), Properties of Process Gases Determined Accurately with Acoustic Techniques, International Conference on Characterization and Metrology of ULSI Technology, Gaithersburg, MD (Accessed April 17, 2024)
Created March 23, 1998, Updated February 17, 2017