TY  - CONF
AU  - John Hurly
C2  - International Conference on Characterization and Metrology of ULSI Technology, Gaithersburg, MD
DA  - 1998-03-23
LA  - en
PB  - International Conference on Characterization and Metrology of ULSI Technology, Gaithersburg, MD
PY  - 1998
TI  - Properties of Process Gases Determined Accurately with Acoustic Techniques
ER  -