Progress Towards SI Traceable Force Metrology for Nanomechanics
David B. Newell, Eric P. Whitenton, John A. Kramar, Jon R. Pratt, Douglas T. Smith
This paper is based, in its entirety, on NIST-approved publications: Calibration of Piezoresistive Cantilever Force Sensors Using the NIST Electrostatic Force Balance, The NIST Electrostatic Force Balance Experiment, The NIST Microforce Realization and Measurement Project, and Microforce and Instrumented Indentation Research at the National Institute of Standards and Technology, Gaithersburg, MD.
Journal of Materials Research
calibration, force metrology, instrumented indentation research, microforce, nanomechanics