Snyder, C.
and Mopsik, F.
(1999),
A precision capacitance cell for measurement of thin film out-of-plane expansion. I. Thermal expansion, Review of Scientific Instruments, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854003
(Accessed April 25, 2024)
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A precision capacitance cell for measurement of thin film out-of-plane expansion. I. Thermal expansion
Published
Author(s)
,
Citation
Review of Scientific Instruments
Volume
69(11)
Pub Type
Journals
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Keywords
capacitance cell, electronic, high sensitivity displacement measurement, inner layer dielectrics, materials, out-of-plane expansion, thermal expansion, thermal properties, thin films, three-terminal measurement
Citation
Created December 31, 1998, Updated October 12, 2021