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A precision capacitance cell for measurement of thin film out-of-plane expansion. I. Thermal expansion

Published

Author(s)

Chad R. Snyder, F I. Mopsik
Citation
Review of Scientific Instruments
Volume
69(11)

Keywords

capacitance cell, electronic, high sensitivity displacement measurement, inner layer dielectrics, materials, out-of-plane expansion, thermal expansion, thermal properties, thin films, three-terminal measurement

Citation

Snyder, C. and Mopsik, F. (1999), A precision capacitance cell for measurement of thin film out-of-plane expansion. I. Thermal expansion, Review of Scientific Instruments, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854003 (Accessed June 24, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 1998, Updated October 12, 2021