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PUBLICATIONS

A Phosphine Sub Atmospheric Delivery System (SADS) applied to Low Pressure Chemical Vapor Deposition (LPCVD) of in situ doped Polysilicon.

Published

Author(s)

Vincent K. Luciani, William D. Young Jr, Lei Chen, Jerry L. Bowser
Proceedings Title
University Government Industry Micro/Nano Symposium
Conference Dates
July 9-10, 2012
Conference Location
Berkeley, CA, US
Pub Type
Conferences

Download Paper

https://doi.org/10.1109/UGIM.2012.6247086
Local Download
Nanotechnology

Citation

Luciani, V. , Young Jr, W. , Chen, L. and Bowser, J. (2012), A Phosphine Sub Atmospheric Delivery System (SADS) applied to Low Pressure Chemical Vapor Deposition (LPCVD) of in situ doped Polysilicon., University Government Industry Micro/Nano Symposium, Berkeley, CA, US, [online], https://doi.org/10.1109/UGIM.2012.6247086, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911015 (Accessed October 6, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created July 22, 2012, Updated October 12, 2021