@conference{828486,
  author = {Vincent Luciani and William Young Jr and Lei Chen and Jerry Bowser},
  title = {A Phosphine Sub Atmospheric Delivery System (SADS) applied to Low Pressure Chemical Vapor Deposition (LPCVD) of in situ doped Polysilicon.},
  year = {2012},
  month = {2012-07-23 00:07:00},
  publisher = {University Government Industry Micro/Nano Symposium, Berkeley, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911015},
  doi = {https://doi.org/10.1109/UGIM.2012.6247086},
  language = {en},
}