PHIDL: Python-based layout and geometry creation for nanolithography

Published

September 27, 2021

Author(s)

Adam McCaughan, Alexander N. Tait, Sonia Buckley, Jeff Chiles, Jeff Shainline, Sae Woo Nam, Dylan M. Oh

Abstract

Computer-aided design (CAD) has become a critical element in the creation of nanopatterned structures and devices. In particular, with the increased adoption of easy-to-learn programming languages like python, there has been a significant rise in the amount of lithographic geometries generated through scripting and programming. However, there are currently unaddressed gaps in usability for open-source CAD tools—especially those in the GDSII design space—that prevent wider adoption by scientists and students who might otherwise benefit from scripted design. For example, constructing relations between adjacent geometries is often much more difficult than necessary—spacing a resonator structure a few micrometers from a readout structure often requires manually coding the placement arithmetic. While inconveniences like these can be overcome by writing custom functions, they are often significant barriers to entry for new users or those less familiar with programming. To help streamline the design process and reduce barrier to entry for scripting designs, we have developed PHIDL, an open-source GDSII-based CAD tool for python.

Citation

Journal of Vacuum Science and Technology B

Pub Type

Journals

Download Paper

https://doi.org/10.1116/6.0001203

Local Download

Citation

McCaughan, A. , Tait, A. , Buckley, S. , Chiles, J. , Shainline, J. , Nam, S. and Oh, D. (2021), PHIDL: Python-based layout and geometry creation for nanolithography, Journal of Vacuum Science and Technology B, [online], https://doi.org/10.1116/6.0001203, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=931324 (Accessed October 16, 2025)