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PUBLICATIONS

Optical microscope illumination analysis using through-focus scanning optical microscopy

Published

Author(s)

Ravikiran Attota, Haesung Park
Citation
Optics Letters
Volume
42
Issue
12
Pub Type
Journals

Download Paper

https://doi.org/10.1364/OL.42.002306

Keywords

optical microscope, illumination analysis, kohler illumination, ANILAS, TSOM, through-focus optical images
Metrology, Optical physics and communications and Reference instruments

Citation

Attota, R. and Park, H. (2017), Optical microscope illumination analysis using through-focus scanning optical microscopy, Optics Letters, [online], https://doi.org/10.1364/OL.42.002306 (Accessed October 13, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created June 8, 2017, Updated November 10, 2018
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