@article{229001, author = {Ravikiran Attota and Haesung Park}, title = {Optical microscope illumination analysis using through-focus scanning optical microscopy}, year = {2017}, number = {42}, month = {2017-06-08}, publisher = {Optics Letters}, doi = {https://doi.org/10.1364/OL.42.002306}, language = {en}, }