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Optical computer aided tomography measurements of plasma uniformity in an inductively coupled discharge, ed. by Seiler, D.G., Diebold, A.C., Bullis, W.M., Shaffner, T.J., McDonald, R., and Walters, E.J.

Published

Author(s)

Eric C. Benck, J R. Roberts
Proceedings Title
Characterization and Metrology for ULSI Technology: 1998 International Conference
Volume
449
Conference Dates
March 23-27, 1998
Conference Location
Gaithersburg, MD
Conference Title
AIP Conf. Proc.

Citation

Benck, E. and Roberts, J. (1998), Optical computer aided tomography measurements of plasma uniformity in an inductively coupled discharge, ed. by Seiler, D.G., Diebold, A.C., Bullis, W.M., Shaffner, T.J., McDonald, R., and Walters, E.J., Characterization and Metrology for ULSI Technology: 1998 International Conference, Gaithersburg, MD (Accessed April 20, 2024)
Created March 1, 1998, Updated February 17, 2017