@conference{144121,
  author = {Eric Benck and J Roberts},
  title = {Optical computer aided tomography measurements of plasma uniformity in an inductively coupled discharge, ed. by Seiler, D.G., Diebold, A.C., Bullis, W.M., Shaffner, T.J., McDonald, R., and Walters, E.J.},
  year = {1998},
  number = {449},
  month = {1998-03-01},
  publisher = {Characterization and Metrology for ULSI Technology: 1998 International Conference, Gaithersburg, MD},
  language = {en},
}