Perkowitz, S.
and Seiler, D.
(1994),
Optical Characterization in Microelectronics Manufacturing, DIANE Publishing Company, Darby, PA
(Accessed April 9, 2026)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Optical Characterization in Microelectronics Manufacturing
Published
Author(s)
S. Perkowitz,
Citation
Optical Characterization in Microelectronics
Publisher Info
DIANE Publishing Company, Darby, PA
Pub Type
Books
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created August 31, 1994, Updated October 12, 2021