TY  - SER
AU  - Perkowitz, S.
AU  - Seiler, David
C2  - DIANE Publishing Company, Darby, PA
DA  - 1994-09-01 00:09:00
LA  - en
PB  - DIANE Publishing Company, Darby, PA
PY  - 1994
TI  - Optical Characterization in Microelectronics Manufacturing
ER  -