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Office of Microelectronics Programs 2003 Programs, Activities, and Accomplishments



Stephen Knight, Joaquin (. Martinez, Michele L. Buckley


Many of the projects managed by OMP are cooperative activities across several operating units. Thus the projects are able to leverage the best expertise available for the specific task across NIST, regardless of organizational structure. Our projects are also aligned by research task area: Lithography Metrology, Critical Dimension and Overlay Metrology, Thin Film and Shallow Junction Metrology, Interconnect and Packaging Metrology, Wafer Characterization and Process Metrology, Test Metrology, and Manufacturing Support.
NIST Interagency/Internal Report (NISTIR) - 6934
Report Number


semiconductor, silicon, metrology, microelectronics, Office of Microelectronics Programs


Knight, S. , Martinez, J. and Buckley, M. (2003), Office of Microelectronics Programs 2003 Programs, Activities, and Accomplishments, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed May 29, 2024)


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Created December 31, 2002, Updated October 12, 2021