Office of Microelectronics Programs 2003 Programs, Activities, and Accomplishments

Published

January 1, 2003

Author(s)

Stephen Knight, Joaquin (. Martinez, Michele L. Buckley

Abstract

Many of the projects managed by OMP are cooperative activities across several operating units. Thus the projects are able to leverage the best expertise available for the specific task across NIST, regardless of organizational structure. Our projects are also aligned by research task area: Lithography Metrology, Critical Dimension and Overlay Metrology, Thin Film and Shallow Junction Metrology, Interconnect and Packaging Metrology, Wafer Characterization and Process Metrology, Test Metrology, and Manufacturing Support.

Citation

NIST Interagency/Internal Report (NISTIR) - 6934

Report Number

6934

NIST Pub Series

NIST Interagency/Internal Report (NISTIR)

Pub Type

NIST Pubs

Keywords

semiconductor, silicon, metrology, microelectronics, Office of Microelectronics Programs

Citation

Knight, S. , Martinez, J. and Buckley, M. (2003), Office of Microelectronics Programs 2003 Programs, Activities, and Accomplishments, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed April 24, 2024)