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Notes on SEM examination of microelectronic devices:

Published

Author(s)

John R Devaney
Citation
- NBS SP 400-35
Report Number
NBS SP 400-35

Citation

Devaney, J. (1977), Notes on SEM examination of microelectronic devices:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-35 (Accessed February 22, 2024)
Created January 1, 1977, Updated May 19, 2023