@misc{1161866,
  author = {John R Devaney},
  title = {Notes on SEM examination of microelectronic devices:},
  year = {1977},
  month = {1977-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-35},
  language = {en},
}