Dutta, P.
, Candela, G.
, Chandler-Horowitz, D.
, Marchiando, J.
and Peckerar, M.
(1988),
Nondestructive Characterization of Oxygen-Ion-Implanted Silicon-On-Insulator Using Multiple-Angle Ellipsometry, Applied Physics Letters
(Accessed July 26, 2024)
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Nondestructive Characterization of Oxygen-Ion-Implanted Silicon-On-Insulator Using Multiple-Angle Ellipsometry
Published
Author(s)
P. Dutta, G. A. Candela, , , M. C. Peckerar
Citation
Applied Physics Letters
Volume
64
Issue
5
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1988, Updated October 12, 2021