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Nondestructive Characterization of Oxygen-Ion-Implanted Silicon-On-Insulator Using Multiple-Angle Ellipsometry

Published

Author(s)

P. Dutta, G. A. Candela, Deane Chandler-Horowitz, Jay F. Marchiando, M. C. Peckerar
Citation
Applied Physics Letters
Volume
64
Issue
5

Citation

Dutta, P. , Candela, G. , Chandler-Horowitz, D. , Marchiando, J. and Peckerar, M. (1988), Nondestructive Characterization of Oxygen-Ion-Implanted Silicon-On-Insulator Using Multiple-Angle Ellipsometry, Applied Physics Letters (Accessed March 4, 2024)
Created December 30, 1988, Updated October 12, 2021