@article{767631,
  author = {P. Dutta and G. Candela and Deane Chandler-Horowitz and Jay Marchiando and M. Peckerar},
  title = {Nondestructive Characterization of Oxygen-Ion-Implanted Silicon-On-Insulator Using Multiple-Angle Ellipsometry},
  year = {1988},
  number = {64},
  month = {1988-12-31 00:12:00},
  publisher = {Applied Physics Letters},
  language = {en},
}