NNI Workshop Instrumentation and Metrology for Nanotechnology
Michael T. Postek, J J. Pellegrino
The NNI Interagency Workshop on Instrumentation and Metrology for Nanotechnology Grand Challenges was held on January 27-29, 2004 in Gaithersburg, Maryland, and was cosponsored by the National Institute of Standards and Technology (NIST), an agency of the U.S. Department of Commerce s Technology Administration, and the NSET. Over 200 nanotechnology experts from industry, academe, Federal agencies, and private research institutes attended the workshop. Participants provided insights on industry metrology needs and the research and development (R&D) that should be undertaken to develop the necessary instrumentation and metrology capabilities. This report summarizes the important outcomes of the workshop. The report is organized around six topics and includes for each topic an overview of the current state of the art, goals and challenges, a vision for the future, recommendations for future research, and implementation strategies to accelerate the development of important technology. The topics are nanocharacterization; nanomechanics; nanoelectronics, nanophotonics and nanomagnetics; nanofabrication; and nanomanufacturing. In addition, a summary of crosscutting computational science issues and challenges is treated as an additional topic. Although not a central focus of the workshop, computational science was recognized as an important element in the future success of the nanometrology component of the NNI.
and Pellegrino, J.
NNI Workshop Instrumentation and Metrology for Nanotechnology, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed November 30, 2023)