@misc{95156,
  author = {Michael Postek and J Pellegrino},
  title = {NNI Workshop Instrumentation and Metrology for Nanotechnology},
  year = {2004},
  month = {2004-11-01},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}