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NIST SURFACE ROUGHNESS AND STEP HEIGHT CALIBRATIONS, Measurement Conditions and Sources of Uncertainty

Published

Author(s)

Theodore V. Vorburger, Thomas Brian Renegar, Xiaoyu Alan Zheng, Jun-Feng Song, Johannes A. Soons, Richard M. Silver

Abstract

NIST methods for calibration of surface roughness parameters and step height are described. The surface roughness parameters currently being measured include roughness average (Ra), root mean square (rms) roughness (Rq), average maximum height of the profile (Rz), maximum height of the profile (Rt), maximum profile peak height (Rp), maximum profile valley depth (Rv), and mean spacing of profile irregularities (RSm). Uncertainty budgets for all measured parameters are also described.
Citation
NIST SURFACE ROUGHNESS AND STEP HEIGHT CALIBRATIONS

Keywords

step height, surface, texture, topography, peak, valley, roughness average, spacing, stylus

Citation

Vorburger, T. , , T. , , X. , Song, J. , Soons, J. and , R. (2014), NIST SURFACE ROUGHNESS AND STEP HEIGHT CALIBRATIONS, Measurement Conditions and Sources of Uncertainty, NIST SURFACE ROUGHNESS AND STEP HEIGHT CALIBRATIONS, [online], http://www.nist.gov/pml/div683/grp02/upload/nistsurfcalib.pdf (Accessed June 12, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created March 17, 2014, Updated February 19, 2017