NIST SURFACE ROUGHNESS AND STEP HEIGHT CALIBRATIONS, Measurement Conditions and Sources of Uncertainty
Theodore V. Vorburger, Thomas B. Renegar, Xiaoyu A. Zheng, Jun-Feng Song, Johannes A. Soons, Richard M. Silver
NIST methods for calibration of surface roughness parameters and step height are described. The surface roughness parameters currently being measured include roughness average (Ra), root mean square (rms) roughness (Rq), average maximum height of the profile (Rz), maximum height of the profile (Rt), maximum profile peak height (Rp), maximum profile valley depth (Rv), and mean spacing of profile irregularities (RSm). Uncertainty budgets for all measured parameters are also described.
NIST SURFACE ROUGHNESS AND STEP HEIGHT CALIBRATIONS