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NIST SURFACE ROUGHNESS AND STEP HEIGHT CALIBRATIONS, Measurement Conditions and Sources of Uncertainty

Published

Author(s)

Theodore V. Vorburger, Thomas B. Renegar, Xiaoyu A. Zheng, Jun-Feng Song, Johannes A. Soons, Richard M. Silver

Abstract

NIST methods for calibration of surface roughness parameters and step height are described. The surface roughness parameters currently being measured include roughness average (Ra), root mean square (rms) roughness (Rq), average maximum height of the profile (Rz), maximum height of the profile (Rt), maximum profile peak height (Rp), maximum profile valley depth (Rv), and mean spacing of profile irregularities (RSm). Uncertainty budgets for all measured parameters are also described.
Citation
NIST SURFACE ROUGHNESS AND STEP HEIGHT CALIBRATIONS

Keywords

step height, surface, texture, topography, peak, valley, roughness average, spacing, stylus
Created March 18, 2014, Updated February 19, 2017