@misc{517756,
  author = {Theodore Vorburger and Thomas and Xiaoyu and Jun-Feng Song and Johannes Soons and Richard},
  title = {NIST SURFACE ROUGHNESS AND STEP HEIGHT CALIBRATIONS, Measurement Conditions and Sources of Uncertainty},
  year = {2014},
  month = {2014-03-18 00:03:00},
  publisher = {NIST SURFACE ROUGHNESS AND STEP HEIGHT CALIBRATIONS},
  language = {en},
}