NIST List of Publications LP 103, National Semiconductor Metrology Program/Semiconductor Electronics Division, 1990-1999

Published

April 12, 2000

Author(s)

A D. Settle-Raskin

Abstract

The National Institute of Standards and Technology (NIST) began its first semiconductor metrology projects over 40 years ago, and continues that work in close cooperation with the semiconductor industry through a variety of research and services. Until 1991, this work was conducted principally by the Semiconductor Electronics Division of NIST's Electronics and Electrical Engineering Laboratory. At that time, a NIST-wide program having a broader scope was undertaken to draw upon an increasing range of the technical resources existing at NIST. In 1994, this activity became the National Semiconductor Metrology Program at NIST which was established by the Department of Commerce in response to requests by the semiconductor industry. The program now adds to this effort the full range of NIST expertise in semiconductor metrology, including electronics and electrical engineering, manufacturing engineering, chemical science and technology, materials sciences and engineering, and fundamental physical sciences to meet the metrology needs of materials, equipment, instrument, and device manufacturers.

Citation

- 103 2000 ED

Report Number

103 2000 ED

Pub Type

NIST Pubs

Keywords

CMOS, National Semiconductor Metrology Program, NSMP, semiconductor, semiconductor electronics division, SED, silcion

Citation

Settle-Raskin, A. (2000), NIST List of Publications LP 103, National Semiconductor Metrology Program/Semiconductor Electronics Division, 1990-1999, , National Institute of Standards and Technology, Gaithersburg, MD (Accessed May 10, 2024)