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NIST Databases for Surface Analysis by Auger-Electron Spectroscopy and X-Ray Photoelectron Spectroscopy

Published

Author(s)

Cedric J. Powell, Aleksander Jablonski

Abstract

A brief description is given of four databases issued by the National Institute of Standards and Technology (NIST) for applications in surface analysis by Auger-electron spectroscopy (AES) and x-ray photoelectron spectroscopy (XPS). These databases are: the NIST X-Ray Photoelectron Spectroscopy Database, the NIST Electron Inelastic-Mean-Free-Path Database, and the NIST Electron Effective-Attenuation-Length Database. The purposes and features of these databases are described, and examples are given of data that can be provided.
Citation
Surface and Interface Analysis

Keywords

Auger-electron spectroscopy, cross sections, databases, effective attenuation lengths, elastic scattering, electron, inelastic scattering, surface analysis, x-ray photoelectron spectroscopy

Citation

Powell, C. and Jablonski, A. (2003), NIST Databases for Surface Analysis by Auger-Electron Spectroscopy and X-Ray Photoelectron Spectroscopy, Surface and Interface Analysis (Accessed April 26, 2024)
Created February 1, 2003, Updated February 17, 2017