Line scales are used throughout industry for a variety of applications. The most common is the stage micrometer, a small graduated glass scale for the calibration of optical instruments such as microscopes. However, stage micrometers are generally not calibrated, except for critical applications, due to time and cost of optical calibration techniques. A method for calibrating line scales is presented which uses electrical test structure metrology. A description of the technique as well as examples of results from the technique are presented.
Proceedings Title: Proceedings of IEEE Instrumentation and Measurement Technology Conference
Conference Location: Hamamatsu, JA
Pub Type: Conferences
electrical calibration, electrical test structure, laser interferometry, length, line scale, measurement uncertainty, optical calibration, potentiometer, scale graduations, stage micrometer, voltage-dividing