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A New Method to Measure the Distance Between Graduation Lines on Graduated Scales

Published

Author(s)

William B. Penzes, Robert Allen, Michael W. Cresswell, L Linholm, E C. Teague

Abstract

Line scales are used throughout industry for a variety of applications. The most common is the stage micrometer, a small graduated glass scale for the calibration of optical instruments such as microscopes. However, stage micrometers are generally not calibrated, except for critical applications, due to time and cost of optical calibration techniques. A method for calibrating line scales is presented which uses electrical test structure metrology. A description of the technique as well as examples of results from the technique are presented.
Proceedings Title
Proceedings of IEEE Instrumentation and Measurement Technology Conference
Conference Location
Hamamatsu, 1, JA

Keywords

electrical calibration, electrical test structure, laser interferometry, length, line scale, measurement uncertainty, optical calibration, potentiometer, scale graduations, stage micrometer, voltage-dividing

Citation

Penzes, W. , Allen, R. , Cresswell, M. , Linholm, L. and Teague, E. (1994), A New Method to Measure the Distance Between Graduation Lines on Graduated Scales, Proceedings of IEEE Instrumentation and Measurement Technology Conference, Hamamatsu, 1, JA (Accessed April 20, 2024)
Created December 31, 1993, Updated October 12, 2021