A New Design and Uncertainty Budget for a Metrology UHV-STM Used in Direct Measurements of Atom Spacings

Published

July 1, 2002

Author(s)

S Gonda, Hui Zhou, Joseph Fu, Richard M. Silver

Abstract

A basic scheme of direct, highly accurate dimensional measurements of nanostructures is presented. We have constructed a scanning tunneling microscope (STM) unit combined with a diode laser-based Michelson interferometer module. The compact size of the STM can be installed in an ultra-high vacuum (UHV) chamber and is capable of measuring atomic spacings on a reconstructed single crystal surface. This method aims at direct dimensional calibartion of microelectronic structures such as linewidths and line/space features. The calibrated diemnsions of tehse features will be traceable to the international unit of length through the HeNe laser wavelength and be a reliable standard for next generation nanostructures and fabrication.

Proceedings Title

Proceedings of SPIE, Nanostructure Science, Metrology, and Technology, Martin C. Peckerar, Michael T. Postek, Jr., Editors

Volume

4608

Conference Dates

September 5, 2001

Conference Location

Gaithersburg, MD, USA

Conference Title

Metrological Sciences

Pub Type

Conferences

Keywords

atom-based standards, hydrogen termination, nanomanufacturing, nanometrology, nanotechnology, si 111, STM

Citation

Gonda, S. , Zhou, H. , Fu, J. and Silver, R. (2002), A New Design and Uncertainty Budget for a Metrology UHV-STM Used in Direct Measurements of Atom Spacings, Proceedings of SPIE, Nanostructure Science, Metrology, and Technology, Martin C. Peckerar, Michael T. Postek, Jr., Editors, Gaithersburg, MD, USA (Accessed October 15, 2025)