TY  - CONF
AU  - S Gonda
AU  - Hui Zhou
AU  - Joseph Fu
AU  - Richard Silver
C2  - Proceedings of SPIE, Nanostructure Science, Metrology, and Technology, Martin C. Peckerar, Michael T. Postek, Jr., Editors, Gaithersburg, MD, USA
DA  - 2002-07-01 00:07:00
LA  - en
M1  - 4608
PB  - Proceedings of SPIE, Nanostructure Science, Metrology, and Technology, Martin C. Peckerar, Michael T. Postek, Jr., Editors, Gaithersburg, MD, USA
PY  - 2002
TI  - A New Design and Uncertainty Budget for a Metrology UHV-STM Used in Direct Measurements of Atom Spacings
ER  -