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Need for Standardization of EBSD Measurements for Microstructural Characterization of Thin Film Structures



Roy H. Geiss, David T. Read


Microstructural characterization of metal thin films includes measurement of grain size, crystallographic texture and misorientation angle across grain boundaries. All of these measurements can be made simultaneously by the use of electron backscattering diffraction (EBSD) in the scanning electron microscope. The use of EBSD measurements to characterize microstructure requires the collection and analysis of thousands of individual diffraction patterns, and the extraction of statistical quantities of interest from the data set. The results depend on the particular analysis procedures used. Since the grains in interconnect structures are often much smaller than those in bulk materials, the measurement and reporting protocols require adaptation of procedures developed for bulk materials. Here we demonstrate results from a specific procedure for collecting and analyzing EBSD data on electrodeposited copper films. We compare texture measurements made with EBSD to x-ray scans on these films. We show that without careful controls, the apparent grain size can vary over a factor of 2 or more, and the time required to acquire the data can differ by hours. The demonstrated practical advantages of EBSD over previously available techniques and the severe effect of experimental procedures on the results support the need for standardization of the methods used for microstructural characterization using EBSD.
Proceedings Title
AIP Conference Proceedigs
Conference Dates
March 27-29, 2007
Conference Location
Gaithersburg, MD, USA
Conference Title
2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics


copper, EBSD, grain size, microstructure, standards, texture, twins.


Geiss, R. and Read, D. (2007), Need for Standardization of EBSD Measurements for Microstructural Characterization of Thin Film Structures, AIP Conference Proceedigs, Gaithersburg, MD, USA, [online], (Accessed March 4, 2024)
Created March 4, 2007, Updated October 12, 2021