Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Nanoscale Measurements with a Through-Focus Scanning-Optical-Microscope



Ravikiran Attota, Richard M. Silver, Thomas A. Germer


We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional optical microscope, by analyzing through-focus scanning-optical-microscope (TSOM) images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including, nanometrology, nanomanufacturing, defect analysis, semiconductor process control, and biotechnology.
Future Fab International


Through Focus, Scanning, Optical Microscope, Nanometrology, TSOM, Nanomanufacturing


Attota, R. , Silver, R. and Germer, T. (2009), Nanoscale Measurements with a Through-Focus Scanning-Optical-Microscope, Future Fab International, [online], (Accessed May 29, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created July 15, 2009, Updated February 19, 2017