Attota, R.
(2018),
Nanoscale 3D Shape Process Monitoring Using TSOM, OSA Imaging and Applied Optics Congress, Orlando, FL, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=925417 (Accessed May 6, 2026)
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Nanoscale 3D Shape Process Monitoring Using TSOM
Published
Author(s)
Proceedings Title
OSA Imaging and Applied Optics Congress
Conference Dates
June 25-28, 2018
Conference Location
Orlando, FL, US
Conference Title
Applied Industrial Optics
Pub Type
Conferences
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Keywords
nanotechnology, nanotechnology, optical metrology, TSOM, through-focus scanning optical microscopy
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Created June 24, 2018, Updated April 11, 2022