Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Nanoscale 3D Shape Process Monitoring Using TSOM

Published

Author(s)

Ravikiran Attota
Proceedings Title
OSA Imaging and Applied Optics Congress
Conference Dates
June 25-28, 2018
Conference Location
Orlando, FL, US
Conference Title
Applied Industrial Optics

Keywords

nanotechnology, nanotechnology, optical metrology, TSOM, through-focus scanning optical microscopy

Citation

Attota, R. (2018), Nanoscale 3D Shape Process Monitoring Using TSOM, OSA Imaging and Applied Optics Congress, Orlando, FL, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=925417 (Accessed April 14, 2024)
Created June 24, 2018, Updated April 11, 2022