Skip to main content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.


The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

Nanoscale 3D Shape Process Monitoring Using TSOM



Ravikiran Attota
Proceedings Title
OSA Imaging and Applied Optics Congress
Conference Dates
June 25-28, 2018
Conference Location
Orlando, FL
Conference Title
Applied Industrial Optics


nanotechnology, nanotechnology, optical metrology, TSOM, through-focus scanning optical microscopy
Created June 25, 2018, Updated July 16, 2018