@conference{873486,
  author = {Ravikiran Attota},
  title = {Nanoscale 3D Shape Process Monitoring Using TSOM},
  year = {2018},
  month = {2018-06-24 04:06:00},
  publisher = {OSA Imaging and Applied Optics Congress, Orlando, FL, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=925417},
  language = {en},
}