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Nanomanufacturing Concerns about Measurements Made in the SEM Part V. Dealing with Noise

Published

Author(s)

Michael T. Postek, Andras Vladar

Abstract

Scanning electron microscopes (SEM) are used extensively in research and advanced manufacturing for materials characterization, metrology and process control. Unfortunately, noise can limit the specimen-specific detail and information that can be acquired in any SEM micrograph, or measurement made from those data. The majority of SEM measurements are done at low primary electron beam currents and fast imaging mode resulting in rather noisy signals - often too noisy. The amount and the type of the noise and the steps taken to deal with it are critical to the quality and amount of the information gathered. This fifth presentation, in this series of SEM dimensional metrology tutorial papers, discusses some of the various causes of measurement uncertainty in scanned particle beam instruments specifically dealing with signal-to-noise (SNR) and its contribution to measurement imprecision.
Proceedings Title
Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
Conference Dates
August 28-September 3, 2016
Conference Location
San Diego, CA
Conference Title
2016 SPIE Optics and Photonics

Keywords

noise, management, de-noising, calibration, charging, measurements, metrology, scanning electron microscope, SEM

Citation

Postek, M. and Vladar, A. (2016), Nanomanufacturing Concerns about Measurements Made in the SEM Part V. Dealing with Noise, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII, San Diego, CA (Accessed April 14, 2024)
Created September 17, 2016, Updated February 19, 2017