@conference{222021,
  author = {Michael Postek and Andras Vladar},
  title = {Nanomanufacturing Concerns about Measurements Made in the SEM Part V. Dealing with Noise},
  year = {2016},
  month = {2016-09-17},
  publisher = {Nanoengineering: Fabrication, Properties, Optics, and Devices XIII, San Diego, CA},
  language = {en},
}