Nanoelectronic Structural Information with Scanning Probe Microscopes
Joseph J. Kopanski, Lin You, Jungjoon Ahn, Yaw S. Obeng
Scanning probe microscope (SPM) based methods to obtain subsurface structural information about nano-structured materials are described. A test structure chip containing structures to produce various surface electric field gradients, spatially varying capacitance structures, and surface magnetic field gradients is described. Buried metal lines with an applied potential from the test chip were imaged with scanning Kelvin force microscopy (SKFM). Buried metal lines that were electrically floating were imaged through their capacitance with the scanning microwave microscope (SMM). COMSOL Multiphysics simulations of the test structures and how they interact with the SPM tip are compared to the measured results. The paper concludes with a discussion of limitations and prospects for improved subsurface imaging with SPMs.
TechConnect World 2015 Proceedings: Nanotechnology
, You, L.
, Ahn, J.
and Obeng, Y.
Nanoelectronic Structural Information with Scanning Probe Microscopes, TechConnect World 2015 Proceedings: Nanotechnology, National Harbor, MD
(Accessed May 27, 2023)