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Nano-Defects In Commercial Bonded SOI and SIMOX

Published

Author(s)

D. K. Sadana, J. Lasky, H. J. Hovel, K. Petrillo, Peter Roitman
Proceedings Title
Proc., 1994 IEEE SOI Conference
Conference Dates
October 4-6, 1994
Conference Location
Nantucket, MA, USA

Citation

Sadana, D. , Lasky, J. , Hovel, H. , Petrillo, K. and Roitman, P. (1994), Nano-Defects In Commercial Bonded SOI and SIMOX, Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA (Accessed April 20, 2024)
Created December 30, 1994, Updated October 12, 2021