Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Nano-Defects In Commercial Bonded SOI and SIMOX



D. K. Sadana, J. Lasky, H. J. Hovel, K. Petrillo, Peter Roitman
Proceedings Title
Proc., 1994 IEEE SOI Conference
Conference Dates
October 4-6, 1994
Conference Location
Nantucket, MA, USA


Sadana, D. , Lasky, J. , Hovel, H. , Petrillo, K. and Roitman, P. (1994), Nano-Defects In Commercial Bonded SOI and SIMOX, Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA (Accessed July 18, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created December 30, 1994, Updated October 12, 2021