Sadana, D.
, Lasky, J.
, Hovel, H.
, Petrillo, K.
and Roitman, P.
(1994),
Nano-Defects In Commercial Bonded SOI and SIMOX, Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA
(Accessed January 16, 2025)
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Nano-Defects In Commercial Bonded SOI and SIMOX
Published
Author(s)
D. K. Sadana, J. Lasky, H. J. Hovel, K. Petrillo,
Proceedings Title
Proc., 1994 IEEE SOI Conference
Conference Dates
October 4-6, 1994
Conference Location
Nantucket, MA, USA
Pub Type
Conferences
Citation
Issues
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Created December 30, 1994, Updated October 12, 2021