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Nano-Defects In Commercial Bonded SOI and SIMOX



D. K. Sadana, J. Lasky, H. J. Hovel, K. Petrillo, Peter Roitman
Proceedings Title
Proc., 1994 IEEE SOI Conference
Conference Dates
October 4-6, 1994
Conference Location
Nantucket, MA, USA


Sadana, D. , Lasky, J. , Hovel, H. , Petrillo, K. and Roitman, P. (1994), Nano-Defects In Commercial Bonded SOI and SIMOX, Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA (Accessed April 20, 2024)
Created December 30, 1994, Updated October 12, 2021