Multiple-Instrument Evaluation of the Consistency and Long Term Stability of Tip Width Calibration for Critical Dimension Atomic Force Microscopy

Published

June 19, 2017

Author(s)

Ronald G. Dixson, Ndubuisi G. Orji

Abstract

Since 2004 standards for calibration of CD-AFM tip width have been available both commercially and through national metrology institutes (NMIs) – such as the National Institute of Standards and Technology (NIST) in the United States. There have been inter-laboratory and inter-method comparisons performed on such samples, but less attention has been paid to long term stability of standards and monitoring for damage, wear, or contamination. Using three different CD-AFM instruments, we have tested the consistency and long-term stability of two independent reference calibrations for CD-AFM tip width. There were circumstances in which damage occurred or samples needed to be cleaned. Nevertheless, our results show agreement within the uncertainties and stability over a period exceeding 10 years.

Citation

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volume

16

Issue

2

Pub Type

Journals

Download Paper

DOI Link

Keywords

CD-AFM, linewidth metrology, standards, traceability

Citation

Dixson, R. and Orji, N. (2017), Multiple-Instrument Evaluation of the Consistency and Long Term Stability of Tip Width Calibration for Critical Dimension Atomic Force Microscopy, Journal of Micro/Nanolithography, MEMS, and MOEMS, [online], https://doi.org/10.1117/1.JMM.16.2.024003 (Accessed October 10, 2025)