@article{229126,
  author = {Ronald Dixson and Ndubuisi Orji},
  title = {Multiple-Instrument Evaluation of the Consistency and Long Term Stability of Tip Width Calibration for Critical Dimension Atomic Force Microscopy},
  year = {2017},
  number = {16},
  month = {2017-06-19},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  doi = {https://doi.org/10.1117/1.JMM.16.2.024003},
  language = {en},
}