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Modeling and Analysis of Scatterometry Signatures for Optical Critical Dimension Reference Material Applications

Published

Author(s)

Heather Patrick, Thomas Germer, Michael W. Cresswell, Richard A. Allen, Ronald G. Dixson, Michael Bishop
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics: 2007
Conference Dates
March 27-29, 2007
Conference Location
Gaithersburg, MD, USA
Conference Title
2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics

Citation

Patrick, H. , Germer, T. , Cresswell, M. , Allen, R. , Dixson, R. and Bishop, M. (2007), Modeling and Analysis of Scatterometry Signatures for Optical Critical Dimension Reference Material Applications, Frontiers of Characterization and Metrology for Nanoelectronics: 2007, Gaithersburg, MD, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32756 (Accessed March 4, 2024)
Created September 29, 2007, Updated October 12, 2021