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PUBLICATIONS

Modeling and Analysis of Scatterometry Signatures for Optical Critical Dimension Reference Material Applications

Published

Author(s)

Heather Patrick, Thomas Germer, Michael W. Cresswell, Richard A. Allen, Ronald G. Dixson, Michael Bishop
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics: 2007
Conference Dates
March 27-29, 2007
Conference Location
Gaithersburg, MD, USA
Conference Title
2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
Pub Type
Conferences

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Citation

Patrick, H. , Germer, T. , Cresswell, M. , Allen, R. , Dixson, R. and Bishop, M. (2007), Modeling and Analysis of Scatterometry Signatures for Optical Critical Dimension Reference Material Applications, Frontiers of Characterization and Metrology for Nanoelectronics: 2007, Gaithersburg, MD, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32756 (Accessed January 15, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created September 29, 2007, Updated October 12, 2021