@conference{842636,
  author = {Heather Patrick and Thomas Germer and Michael Cresswell and Richard Allen and Ronald Dixson and Michael Bishop},
  title = {Modeling and Analysis of Scatterometry Signatures for Optical Critical Dimension Reference Material Applications},
  year = {2007},
  month = {2007-09-30 00:09:00},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics: 2007, Gaithersburg, MD, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32756},
  language = {en},
}