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A model of particle growth in silane discharges

Published

Author(s)

A Gallagher
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume
62

Citation

Gallagher, A. (2000), A model of particle growth in silane discharges, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics) (Accessed March 3, 2024)
Created January 1, 2000, Updated February 17, 2017