TY  - JOUR
AU  - Gallagher, A
C2  - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
DA  - 2000-01-01
LA  - en
M1  - 62
PB  - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
PY  - 2000
TI  - A model of particle growth in silane discharges
ER  -