Marchiando, J.
, Kopanski, J.
and Lowney, J.
(1997),
A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements, Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA
(Accessed March 13, 2025)
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A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements
Published
Author(s)
, ,
Proceedings Title
Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors
Conference Dates
April 6-9, 1997
Conference Location
Research Triangle Park, NC, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1997, Updated October 12, 2021