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PUBLICATIONS

A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements

Published

Author(s)

Jay F. Marchiando, Joseph Kopanski, J R. Lowney
Proceedings Title
Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors
Conference Dates
April 6-9, 1997
Conference Location
Research Triangle Park, NC, USA
Pub Type
Conferences

Citation

Marchiando, J. , Kopanski, J. and Lowney, J. (1997), A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements, Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA (Accessed April 19, 2024)

Created December 30, 1997, Updated October 12, 2021