@conference{767541,
  author = {Jay Marchiando and Joseph Kopanski and J Lowney},
  title = {A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements},
  year = {1997},
  month = {1997-12-31 00:12:00},
  publisher = {Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA},
  language = {en},
}