We describe the design of a miniature Fizeau interferometer, which is intended to be an accurate curvature sensor for the NIST Geometry Measuring (GEMM), which is used to measure aspheric and free form surfaces. The interferometer was designed for simultaneous measurements of figure and the distance between the sensor and part under test.
Conference Dates: October 9-11, 2006
Conference Location: Rochester, NY
Conference Title: Technical Digest of the 2006 Optical Society of America Optical Fabrication and Testing Meeting
Pub Type: Conferences