Microwave Dielectric Characterization of Unpatterned Thin Films Using a TE0γŅ Dielectric Resonator Technique Theory
Richard G. Geyer, Clifford Krowne
An axially-layered cylindrical dielectric resonator comprised of substrate and thin film is placed into a parallel plate waveguide and operated in axi-symmetric TE0γŅ resonant mode structure for microwave dielectric thin film characterization. With this mode structure, dielectric properties in the plane of the film are tested. The presence of a tunable gap in the parallel plate waveguide allows partial electric field filling factors in the film to be maximized and dielectric thin film characterization over a tunable frequency range. Self-adjoint operator theory is used to solve the differential equations describing the z-dependent field variations and solutions are radially mode-matched. Uncertainty analyses for thin film permittivity and dielectric loss tangent are presented. Unpatterned thin film measurements with this technique may then be compared with those obtained from coplanar waveguide patterned devices.
and Krowne, C.
Microwave Dielectric Characterization of Unpatterned Thin Films Using a TE<sub>0γŅ</sub> Dielectric Resonator Technique Theory, Technical Note (NIST TN), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed November 29, 2023)