Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Micromachined Alkali Atom Vapor Cells for Chip-Scale Atomic Clocks

Published

Author(s)

Li-Anne Liew, Svenja A. Knappe, John M. Moreland, Hugh Robinson, Leo W. Hollberg, John Kitching

Abstract

This paper describes the fabrication of chip-sized alkali atom vapor cells, for use in highly miniaturized atomic frequency references, using silicon micromachining and anodic bonding technology. The cells consist of silicon cavities with internal volume ranging from a few mm3 to less than 1 mm3. The cells were filled with cesium and nitrogen buffer gas either by chemical reaction of cesium chloride and barium azide, or by direct injection of elemental cesium within a controlled anaerobic environment. Cesium optical absorption spectra were obtained from the cells, and coherent population trapping resonances with linewidth of about 1 kHz were measured.
Proceedings Title
Proceedings of the 17th Annual IEEE International Conference on Micro Electromechanical Systems (MEMS 2004)
Conference Dates
January 25-29, 2004
Conference Location
Maastricht, 1, NL
Conference Title
17th IEEE International Conference on Micro Electromechanical Systems (MEMS 2004)

Keywords

atomic clock, cell, cesium, MEMS, microfabrication

Citation

Liew, L. , Knappe, S. , Moreland, J. , Robinson, H. , Hollberg, L. and Kitching, J. (2004), Micromachined Alkali Atom Vapor Cells for Chip-Scale Atomic Clocks, Proceedings of the 17th Annual IEEE International Conference on Micro Electromechanical Systems (MEMS 2004), Maastricht, 1, NL (Accessed April 14, 2024)
Created January 29, 2004, Updated October 12, 2021